Chin. J. Semicond. > 2006, Volume 27 > Issue 1 > 150-155

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A MEMS Based Focus Plane Array for Infrared Imaging

Li Chaobo, Jiao Binbin, Shi Shali, Ye Tianchun, Chen Dapeng, Zhang Qingchuan, Guo Zheying, Dong Fengliang and Wu Xiaoping

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Abstract: Based on the opto-mechanical effect and MEMS technology,a novel substrate-free FPA with a thermally isolated structure for uncooled infrared imaging is developed.Alternately evaporating Au on a SiNx cantilever is used for thermal isolation.A human’s thermal image is obtained successfully using the infrared imaging system composed of the FPA and optical detection system.Experimental results show that the realization of thermal isolation in the substrate-free FPA increases the temperature of the deflecting leg effectively,while the NETD is about 200mK.

Key words: MEMSFPAopto-mechanicalLPCVDSiNxNETD

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    Received: 20 August 2015 Revised: Online: Published: 01 January 2006

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      Li Chaobo, Jiao Binbin, Shi Shali, Ye Tianchun, Chen Dapeng, Zhang Qingchuan, Guo Zheying, Dong Fengliang, Wu Xiaoping. A MEMS Based Focus Plane Array for Infrared Imaging[J]. Journal of Semiconductors, 2006, In Press. Li C B, Jiao B B, Shi S L, Ye T C, Chen D P, Zhang Q C, Guo Z Y, Dong F L, Wu X P. A MEMS Based Focus Plane Array for Infrared Imaging[J]. Chin. J. Semicond., 2006, 27(1): 150.Export: BibTex EndNote
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      Li Chaobo, Jiao Binbin, Shi Shali, Ye Tianchun, Chen Dapeng, Zhang Qingchuan, Guo Zheying, Dong Fengliang, Wu Xiaoping. A MEMS Based Focus Plane Array for Infrared Imaging[J]. Journal of Semiconductors, 2006, In Press.

      Li C B, Jiao B B, Shi S L, Ye T C, Chen D P, Zhang Q C, Guo Z Y, Dong F L, Wu X P. A MEMS Based Focus Plane Array for Infrared Imaging[J]. Chin. J. Semicond., 2006, 27(1): 150.
      Export: BibTex EndNote

      A MEMS Based Focus Plane Array for Infrared Imaging

      • Received Date: 2015-08-20

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