| Citation: |
Fang Jie, Liu Zewen, Zhao Jiahao, Chen Zhongmin, Wei Jia, Liu Litian, Li Zhijian. A Passive Low-Pass Filter on Low-Loss Substrate[J]. Journal of Semiconductors, 2006, In Press.
Fang J, Liu Z W, Zhao J H, Chen Z M, Wei J, Liu L T, Li Z J. A Passive Low-Pass Filter on Low-Loss Substrate[J]. Chin. J. Semicond., 2006, 27(9): 1572.
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A Passive Low-Pass Filter on Low-Loss Substrate
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Abstract
The loss mechanisms of different passive devices (on-chip inductors and capacitors) on different substrates are analyzed and compared.OPS (oxidized porous silicon) and HR (high-resistivity) substrates are used as low-loss substrates for on-chip planar LPF (low pass filter) fabrication.For the study of substrate loss,a planar coil inductor is also designed.Simulation results show that Q (the quality factor) of the inductor on both substrates is over 20.Measurements of the LPF on OPS substrate give a -3dB bandwidth of 2.9GHz and a midband insertion loss of 0.87dB at 500MHz.The LPF on HR substrate gives a -3dB bandwidth of 2.3GHz and a midband insertion loss of 0.42dB at 500MHz.-
Keywords:
- LC low-pass filter,
- low-loss substrate,
- on-chip inductor,
- RF
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References
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