Chin. J. Semicond. > 2005, Volume 26 > Issue 3 > 547-553

PDF

Abstract: 研究了一种带有自检功能的在平面内自限制压阻式加速度传感器.为实现该加速度传感器,提出了一套新的体硅微机械工艺,使用普通硅片取代SOI硅片来制作器件.传感器采用在深槽侧壁(悬臂梁弯曲的表面)制作压阻的方法,灵敏度比在硅表面上制作压阻的传统器件高近一倍.传感器利用集成在内的静电驱动器,实现电自检测功能.

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 2479 Times PDF downloads: 1851 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 March 2005

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      带有静电自检测功能的高灵敏度加速度传感器[J]. Journal of Semiconductors, 2005, In Press. 带有静电自检测功能的高灵敏度加速度传感器[J]. Chin. J. Semicond., 2005, 26(3): 547.Export: BibTex EndNote
      Citation:
      带有静电自检测功能的高灵敏度加速度传感器[J]. Journal of Semiconductors, 2005, In Press.

      带有静电自检测功能的高灵敏度加速度传感器[J]. Chin. J. Semicond., 2005, 26(3): 547.
      Export: BibTex EndNote

      带有静电自检测功能的高灵敏度加速度传感器

      • Received Date: 2015-08-19

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return