Chin. J. Semicond. > 2001, Volume 22 > Issue 7 > 924-928

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Key words: SOI, 压力传感器, 低温键合, 智能剥离, 高温

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    Received: 20 August 2015 Revised: Online: Published: 01 July 2001

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      • Received Date: 2015-08-20

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