Chin. J. Semicond. > 2002, Volume 23 > Issue 12 > 1267-1274
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亚50nm自对准双栅MOSFET的结构设计(英文)

殷华湘 and 徐秋霞

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Key words: 双栅MOSFET, 结构设计, 侧墙效应, SCD

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    Received: 19 August 2015 Revised: Online: Published: 01 December 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(12): 1267-1274
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      • Received Date: 2015-08-19

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