Chin. J. Semicond. > 1992, Volume 13 > Issue 8 > 518-522

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用质量分离的低能离子束外延法生长β-FeSi_2半导体外延膜的初步研究

姚振钰 , 任治璋 , 王向明 , 刘志凯 , 黄大定 , 秦复光 and 林兰英

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    Received: 19 August 2015 Revised: Online: Published: 01 August 1992

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      Article Navigation >  Journal of Semiconductors  > 1992  >  13(8): 518-522
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      • Received Date: 2015-08-19

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