Chin. J. Semicond. > 2005, Volume 26 > Issue 7 > 1359-1363
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Si/SiGe/Si-SOI异质结构的同步辐射双晶貌相术和高分辨三轴晶X射线衍射

马通达 , 屠海令 , 胡广勇 , 邵贝羚 and 刘安生

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Key words: 同步辐射双晶貌相术, 高分辨三轴晶X射线衍射, 衍射双峰

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    Received: 18 August 2015 Revised: Online: Published: 01 July 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(7): 1359-1363
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      • Received Date: 2015-08-18

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