| Citation: |
Lou Lifei, Yang Yintang, Li Yuejin, Zhang Ping. Structural Design and Testing of Silicon-Based PZT Thin Film Micro-Sensors[J]. Journal of Semiconductors, 2007, In Press.
Lou L F, Yang Y T, Li Y J, Zhang P. Structural Design and Testing of Silicon-Based PZT Thin Film Micro-Sensors[J]. Chin. J. Semicond., 2007, 28(5): 778.
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Structural Design and Testing of Silicon-Based PZT Thin Film Micro-Sensors
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Abstract
The structural and territorial design of PZT thin film micro-sensors is processed.Using MEMS processes and standard silicon-based IC,the key techniques and technical conditions are obtained for PZT thin film micro-cantilever beams based on silicon.At the same time,the preparation and micro-pattern etching techniques of PZT thin films are investigated by experiment.Finally,a PZT thin film micro-sensor is successfully etched and the experimental foundations are laid for the research and development of the system on a chip. -
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