Chin. J. Semicond. > 2000, Volume 21 > Issue 9 > 849-852

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Improvement in Electrical Properties of SIMNI Films by Multiple-Step Implantation

卢殿通 and Heiner Ryssel

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    Received: 20 August 2015 Revised: Online: Published: 01 September 2000

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      • Received Date: 2015-08-20

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