Chin. J. Semicond. > 1986, Volume 7 > Issue 3 > 327-330

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溅射GaAs SOI电子束退火再结晶及MBE GaAs SOI高频感应石墨棒热退火再结晶

朱蔚雯 and 王渭源

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    Received: 20 August 2015 Revised: Online: Published: 01 March 1986

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      • Received Date: 2015-08-20

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