Chin. J. Semicond. > 2005, Volume 26 > Issue 7 > 1374-1378
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CMOS兼容电容型湿度传感器的理论模型

陈军宁 , 于峰崎 , 王阳 and 柯导明

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Key words: 湿度传感器, 电容, 介电常数, 聚酰亚胺, 灵敏度

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    Received: 18 August 2015 Revised: Online: Published: 01 July 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(7): 1374-1378
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      • Received Date: 2015-08-18

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