Abstract: Phase systematical and random errors of silica-based AWG are analyzed in detail using transmission function method.The results of systematical error analysis show that the deviation from designed values of effective refraction index and path difference of arrayed waveguides makes central wavelength deviate from designed value,and the deviation of the effective refractive index of slab waveguides,the pitch of arrayed waveguides and the focal length makes channel spacing deviate from designed value.The results of random error analysis show that the fluctuation of path difference,core refractive index,width and height of core impacts on crosstalk more than that of undercladding and overcladding refractive index

Key words: arrayed waveguide grating, crosstalk, phase error, numerical analysis