Chin. J. Semicond. > 2005, Volume 26 > Issue 9 > 1722-1726
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Fabrication and Simulation of Silicon-on-Insulator Structure with Si3N4 as a Buried Insulator

Liu Qibin , Lin Qing , Liu Weili , Feng Songlin and and Song Zhitang

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Key words: Si3N4, new SOI structures, self-heating effects

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    Received: 18 August 2015 Revised: Online: Published: 01 September 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(9): 1722-1726
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      • Received Date: 2015-08-18

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