Abstract: This paper investigates the control of growth of self-assembled semiconductor quantum dots.After simulating the self-assembled quantum dots based on mean-field model and nonmean field model,a method to control the sizes of quantum dots by suppressing the ripening of islands is proposed,and a computer simulation based on this method is carried out.Results show that separating adatom sea into many nanometer-sized isolated cells will suppress the ripening of islands,thus growing rates can be adjusted to obtain ordered and uniform quantum dot arrays.

Key words: self-assembly, quantum dot, ripening