Chin. J. Semicond. > 2005, Volume 26 > Issue 2 > 276-280

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Abstract: A 1×8 multimode interference power splitter with multimode input/output waveguides in SOI material is designed by the beam propagation method and fabricated by the inductive coupled plasma etching technology for use in fiber optics communication systems.The fabricated device exhibits low loss and good coupling uniformity.The excess loss is lower than 0.8dB,and the uniformity is 0.45dB at the wavelength of 1550nm.Moreover,the polarization dependent loss is lower than 0.7dB at 1550nm.The device size is only 2mm×10mm.

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    Received: 19 August 2015 Revised: Online: Published: 01 February 2005

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      An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides[J]. Journal of Semiconductors, 2005, In Press. An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides[J]. Chin. J. Semicond., 2005, 26(2): 276.Export: BibTex EndNote
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      An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides[J]. Journal of Semiconductors, 2005, In Press.

      An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides[J]. Chin. J. Semicond., 2005, 26(2): 276.
      Export: BibTex EndNote

      An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides

      • Received Date: 2015-08-19

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