Chin. J. Semicond. > 2005, Volume 26 > Issue S1 > 117-120

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Over Wet-Etching Self-Aligned Ion Implantation Doping Technology on Fabricating SiGe/Si HBT

Yao Fei, Cheng Buwen, Xue Chunlai and Wang Qiming

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Abstract: A new technology of fabricating SiGe/Si HBT--over wet-etching self-aligned ion implantation doping technology is first presented. Over etching the sacrificing layer SiO2 ensures the masking metal layer large enough to shield the following self-aligned ion implantation doping to the base area, and the self-aligned ion implantation doping lessens the non-latent resistance and extends the thickness of the base, resulting the ohm contact easier to be made.

Key words: over wet etching self-aligned ion implantation dopingSiGe HBT

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    Received: 19 August 2015 Revised: Online: Published: 01 December 2005

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      Yao Fei, Cheng Buwen, Xue Chunlai, Wang Qiming. Over Wet-Etching Self-Aligned Ion Implantation Doping Technology on Fabricating SiGe/Si HBT[J]. Journal of Semiconductors, 2005, In Press. Yao F, Cheng B W, Xue C L, Wang Q M. Over Wet-Etching Self-Aligned Ion Implantation Doping Technology on Fabricating SiGe/Si HBT[J]. Chin. J. Semicond., 2005, 26(13): 117.Export: BibTex EndNote
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      Yao Fei, Cheng Buwen, Xue Chunlai, Wang Qiming. Over Wet-Etching Self-Aligned Ion Implantation Doping Technology on Fabricating SiGe/Si HBT[J]. Journal of Semiconductors, 2005, In Press.

      Yao F, Cheng B W, Xue C L, Wang Q M. Over Wet-Etching Self-Aligned Ion Implantation Doping Technology on Fabricating SiGe/Si HBT[J]. Chin. J. Semicond., 2005, 26(13): 117.
      Export: BibTex EndNote

      Over Wet-Etching Self-Aligned Ion Implantation Doping Technology on Fabricating SiGe/Si HBT

      • Received Date: 2015-08-19

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