Chin. J. Semicond. > 2004, Volume 25 > Issue 2 > 200-205

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SiO_2/SiC界面对4H-SiC n-MOSFET反型沟道电子迁移率的影响

徐静平 , 吴海平 , 黎沛涛 and 韩弼

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Key words: SiC, n-MOSFET, SiO2/SiC界面, 迁移率

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    History

    Received: 19 August 2015 Revised: Online: Published: 01 February 2004

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      • Received Date: 2015-08-19

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