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Zhou Zhen , Han Qin , Du Yun , Yang Xiaohong , Wu Ronghan , Huang Yongqing and and Ren Xiaomin
Key words: GaAs, MOEMS, RCE, photodetector, tuning, single cantilever beam
Article views: 2257 Times PDF downloads: 1138 Times Cited by: 0 Times
Received: 19 August 2015 Revised: Online: Published: 01 June 2005
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