| Citation: |
Dan Yaping, Yao Yongzhao, Wang Yan, Yue Ruifeng, Liu Litian. Red Light Emission from Si-Based Fabry-Perot Microcavities[J]. Journal of Semiconductors, 2003, In Press.
Dan Y P, Yao Y Z, Wang Y, Yue R F, Liu L T. Red Light Emission from Si-Based Fabry-Perot Microcavities[J]. Chin. J. Semicond., 2003, 24(S1): 60.
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Red Light Emission from Si-Based Fabry-Perot Microcavities
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Abstract
A microcavity prepared by PE VD is proposed. Its distributed Bragg ref1ectors are composed of periodica11y stacked a-SiO2 = H/ a-Si= H 1ayers and the active 1ayer is filled With a-Si I= H. The structure ofa microcavity is determined through simu1ating. In eXperiment, a microcavity is prepared at 250 and annea1ed at different temperatures. Ref1ectance and Pl spectra are recorded on as-deposited and annea1ed samp1es. It is indicated that the as-deposited samp1e performs We11 and even better after annea1ed at 350 , however Worse after annea1ed at 450 .-
Keywords:
- microcavity,
- Bragg ref1ector,
- PECVD,
- annealing
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References
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Proportional views
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