| Citation: |
Chen Xu, Wang Zhigong. Characterization and Modeling of Finite-Ground Coplanar Waveguides in 0.13μm CMOS[J]. Journal of Semiconductors, 2006, In Press.
Chen X, Wang Z G. Characterization and Modeling of Finite-Ground Coplanar Waveguides in 0.13μm CMOS[J]. Chin. J. Semicond., 2006, 27(6): 982.
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Characterization and Modeling of Finite-Ground Coplanar Waveguides in 0.13μm CMOS
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Abstract
We discuss the characterization and modeling of coplanar waveguides (CPW) realized in TSMC 0.13μm CMOS process.EM-field simulations with momentum are performed to estimate the important parameters of the transmission lines,such as characteristic impedance and propagation loss.Coplanar waveguide libraries are designed with Z values of 30,50,70,and 100Ω.Finally,the propagation constant and the characteristic impedance are measured in a frequency range from 0.1 to 40GHz with a vector-network analyzer,using the short-open-load-thru (SOLT) de-embedding technique.The distributed parameters of the CPWs are extracted from the measured S-parameters.-
Keywords:
- coplanar waveguide,
- CMOS,
- S-parameter
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References
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