Chin. J. Semicond. > 2003, Volume 24 > Issue S1 > 11-16

Later Silicon Ages

Lin Hongyi

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Abstract: In the last decade of the 20th century, a brand-new field of nano scale science and technology has emerged in the World. The fundamental and applications of nano scale science and technolgy are intrOduced. The applications of nanotechnology Which include uantum function devices, film sensors, nanodisplay, nanometer scale materials, micrOelectrOmechanical systems ( MEMS , nanobiological technology and atomic engineering, etc. are prospected. Some e perimental results are given.

Key words: nano scale science and technology nanometer material science nanoelectronics 纳米材料 纳米电子学

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    Received: 16 March 2016 Revised: Online: Published: 01 January 2003

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      Lin Hongyi. Later Silicon Ages[J]. Journal of Semiconductors, 2003, In Press. Lin H Y. Later Silicon Ages[J]. Chin. J. Semicond., 2003, 24(S1): 11.Export: BibTex EndNote
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      Lin Hongyi. Later Silicon Ages[J]. Journal of Semiconductors, 2003, In Press.

      Lin H Y. Later Silicon Ages[J]. Chin. J. Semicond., 2003, 24(S1): 11.
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      Later Silicon Ages

      • Received Date: 2016-03-16
      • Published Date: 2016-03-15

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