Chin. J. Semicond. > 2006, Volume 27 > Issue 11 > 1974-1980

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Design and Fabrication of Gate-Type Resonant Tunneling Transistors

Guo Weilian, Liang Huilai, Song Ruiliang, Zhang Shilin, Mao Luhong, Hu Liuchang, Li Jianheng, Qi Haitao, Feng Zhen, Tian Guoping, Shang Yuehui, Liu Yongqiang, Li Yali, Yuan Mingwen and Li Xiaobai

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Abstract: A GaAs-based resonant tunneling transistor with a gate structure (GRTT) has been designed and fabricated successfully for the first time in mainland China.The design of the material structure,device structure,and photolithography mask;the fabrication of the device;and the parameter measurement and analysis are described systematically.The fabricated GRTT has a maximum PVCR of 46 and maximum transconductance of 8mS.This work establishes a foundation for further improvement of the performance and parameters of RTTs.

Key words: RTTgate controlled deviceGaAs based quantum device

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    Received: 18 August 2015 Revised: Online: Published: 01 November 2006

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      Guo Weilian, Liang Huilai, Song Ruiliang, Zhang Shilin, Mao Luhong, Hu Liuchang, Li Jianheng, Qi Haitao, Feng Zhen, Tian Guoping, Shang Yuehui, Liu Yongqiang, Li Yali, Yuan Mingwen, Li Xiaobai. Design and Fabrication of Gate-Type Resonant Tunneling Transistors[J]. Journal of Semiconductors, 2006, In Press. Guo W L, Liang H L, Song R L, Zhang S L, Mao L H, Hu L C, Li J H, Qi H T, Feng Z, Tian G P, Shang Y H, Liu Y Q, Li Y L, Yuan M W, Li X B. Design and Fabrication of Gate-Type Resonant Tunneling Transistors[J]. Chin. J. Semicond., 2006, 27(11): 1974.Export: BibTex EndNote
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      Guo Weilian, Liang Huilai, Song Ruiliang, Zhang Shilin, Mao Luhong, Hu Liuchang, Li Jianheng, Qi Haitao, Feng Zhen, Tian Guoping, Shang Yuehui, Liu Yongqiang, Li Yali, Yuan Mingwen, Li Xiaobai. Design and Fabrication of Gate-Type Resonant Tunneling Transistors[J]. Journal of Semiconductors, 2006, In Press.

      Guo W L, Liang H L, Song R L, Zhang S L, Mao L H, Hu L C, Li J H, Qi H T, Feng Z, Tian G P, Shang Y H, Liu Y Q, Li Y L, Yuan M W, Li X B. Design and Fabrication of Gate-Type Resonant Tunneling Transistors[J]. Chin. J. Semicond., 2006, 27(11): 1974.
      Export: BibTex EndNote

      Design and Fabrication of Gate-Type Resonant Tunneling Transistors

      • Received Date: 2015-08-18

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