Chin. J. Semicond. > 2007, Volume 28 > Issue 3 > 425-429

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Deposition of Al-N Co-Doped p-Type Zn0.95Mg0.05O Thin Films

Jian Zhongxiang, Ye Zhizhen, Gao Guohua, Lu Yangfan, Zhao Binghui, Zeng Yujia and Zhu Liping

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Abstract: Al-N codoped p-type Zn0.95Mg0.05O thin films were deposited on glass substrates by DC reactive manetron sputtering, N2O was used as the N doping source. The XRD patterns showed that the introduction of Mg and Al has no effect on the crystallinity of the films, the films all showed c-axis preferential orientation.A conversion of conduction type was confirmed by Hall effect measurement in a range of temperature from 400 to 530℃.The lowest reliable room temperature resistivity was found to be 58.5Ω·cm,with a carrier concentration of 1.95e17cm-3 and a Hall mobility of 0.546cm2/(V·s).The p-type behavior is stable.The optical transmittance spectra reveal blue shift in optical bandgap for the p-type Zn0.95Mg0.05O comparing with that for pure ZnO,which confirms the effective incorporation of Mg.The band gap of alloy is controllable.

Key words: ZnMgOp-type dopingthin films

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    Received: 18 August 2015 Revised: 30 September 2006 Online: Published: 01 March 2007

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      Jian Zhongxiang, Ye Zhizhen, Gao Guohua, Lu Yangfan, Zhao Binghui, Zeng Yujia, Zhu Liping. Deposition of Al-N Co-Doped p-Type Zn0.95Mg0.05O Thin Films[J]. Journal of Semiconductors, 2007, In Press. Jian Z X, Ye Z Z, Gao G H, Lu Y F, Zhao B H, Zeng Y J, Zhu L P. Deposition of Al-N Co-Doped p-Type Zn0.95Mg0.05O Thin Films[J]. Chin. J. Semicond., 2007, 28(3): 425.Export: BibTex EndNote
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      Jian Zhongxiang, Ye Zhizhen, Gao Guohua, Lu Yangfan, Zhao Binghui, Zeng Yujia, Zhu Liping. Deposition of Al-N Co-Doped p-Type Zn0.95Mg0.05O Thin Films[J]. Journal of Semiconductors, 2007, In Press.

      Jian Z X, Ye Z Z, Gao G H, Lu Y F, Zhao B H, Zeng Y J, Zhu L P. Deposition of Al-N Co-Doped p-Type Zn0.95Mg0.05O Thin Films[J]. Chin. J. Semicond., 2007, 28(3): 425.
      Export: BibTex EndNote

      Deposition of Al-N Co-Doped p-Type Zn0.95Mg0.05O Thin Films

      • Received Date: 2015-08-18
      • Accepted Date: 2006-09-11
      • Revised Date: 2006-09-30
      • Published Date: 2007-03-06

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