Chin. J. Semicond. > 2005, Volume 26 > Issue S1 > 94-97

CONTENTS

Mn-Si Films Fabricated by Low Energy Ion Beam Deposition

Liu Lifeng, Chen Nuofu, Chai Chunlin, Yang Shaoyan and Liu Zhikai

+ Author Affiliations

PDF

Abstract: Manganese content gradually variational Mn-Si film is fabricated by low energy ion beam deposition method.The compositional properties of samples are studied by Auger electron spectroscopy.The structure and surface morphologies of samples are analyzed by X-ray diffraction and atomic force microscopy,respectively.Measurements show that manganese ions reach deeper in the sample grown at 300℃ than one grown at room temperature,the structure of which is amorphous.The structure of the sample grown at 300℃ is crystallized.There is no new phase except silicon in the sample grown at 300℃ and indicates that Mn-Si solid solution film is obtained.

Key words: low energy ion beamsiliconmanganeseX-ray diffraction

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 2645 Times PDF downloads: 1157 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 December 2005

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Liu Lifeng, Chen Nuofu, Chai Chunlin, Yang Shaoyan, Liu Zhikai. Mn-Si Films Fabricated by Low Energy Ion Beam Deposition[J]. Journal of Semiconductors, 2005, In Press. Liu L F, Chen N F, Chai C L, Yang S Y, Liu Z K. Mn-Si Films Fabricated by Low Energy Ion Beam Deposition[J]. Chin. J. Semicond., 2005, 26(13): 94.Export: BibTex EndNote
      Citation:
      Liu Lifeng, Chen Nuofu, Chai Chunlin, Yang Shaoyan, Liu Zhikai. Mn-Si Films Fabricated by Low Energy Ion Beam Deposition[J]. Journal of Semiconductors, 2005, In Press.

      Liu L F, Chen N F, Chai C L, Yang S Y, Liu Z K. Mn-Si Films Fabricated by Low Energy Ion Beam Deposition[J]. Chin. J. Semicond., 2005, 26(13): 94.
      Export: BibTex EndNote

      Mn-Si Films Fabricated by Low Energy Ion Beam Deposition

      • Received Date: 2015-08-19

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return