Chin. J. Semicond. > 2005, Volume 26 > Issue S1 > 200-203

CONTENTS

Effect of High Temperatures on Characteristics of Thermo-Optical Tunable Optical Filters

Zuo Yuhua, Mao Rongwei, Li Chuanbo, Zhao Lei, Cai Xiao, Cheng Buwen and Wang Qiming

+ Author Affiliations

PDF

Abstract: The effect of high temperature on the characterstics of Si-based thermo-optical tunable optical filters is extensively investigated.Rapid thermal treatments from 400℃ to 800℃ are employed to the filters and transmittance properties and atomic force microscopes (AFM) are measured.It is found that the transmittance peak blue shifts and the reflectance of DBR decreases,the surface roughness and the grain size of the samples become larger,when the heat treatment temperature increases.It is suggested that the blue-shift of the transmittance peak is induced by the reduce of center wavelength of DBR,which is caused by the refractive index as well as the thickness change of amorphous Si and SiO2 at high temperature.The decrease of the reflectivity and transmittance peak intensity is contributed to the larger roughness of surface and interface at higher temperature

Key words: thermal-opticalFabry-Perottunable optical filterrapid heat treatment

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 2536 Times PDF downloads: 963 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 December 2005

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Zuo Yuhua, Mao Rongwei, Li Chuanbo, Zhao Lei, Cai Xiao, Cheng Buwen, Wang Qiming. Effect of High Temperatures on Characteristics of Thermo-Optical Tunable Optical Filters[J]. Journal of Semiconductors, 2005, In Press. Zuo Y H, Mao R W, Li C B, Zhao L, Cai X, Cheng B W, Wang Q M. Effect of High Temperatures on Characteristics of Thermo-Optical Tunable Optical Filters[J]. Chin. J. Semicond., 2005, 26(13): 200.Export: BibTex EndNote
      Citation:
      Zuo Yuhua, Mao Rongwei, Li Chuanbo, Zhao Lei, Cai Xiao, Cheng Buwen, Wang Qiming. Effect of High Temperatures on Characteristics of Thermo-Optical Tunable Optical Filters[J]. Journal of Semiconductors, 2005, In Press.

      Zuo Y H, Mao R W, Li C B, Zhao L, Cai X, Cheng B W, Wang Q M. Effect of High Temperatures on Characteristics of Thermo-Optical Tunable Optical Filters[J]. Chin. J. Semicond., 2005, 26(13): 200.
      Export: BibTex EndNote

      Effect of High Temperatures on Characteristics of Thermo-Optical Tunable Optical Filters

      • Received Date: 2015-08-19

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return