Chin. J. Semicond. > 2001, Volume 22 > Issue 6 > 741-745
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边缘阻尼对横向振动微谐振器品质因子的影响

章彬 and 黄庆安

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Key words: 谐振器, Q值, 振动, 空气阻尼, 功耗

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    Received: 20 August 2015 Revised: Online: Published: 01 June 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(6): 741-745
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      • Received Date: 2015-08-20

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