Chin. J. Semicond. > 2006, Volume 27 > Issue 4 > 658-661

PAPERS

Design of a Silicon Beam Resonator for a Novel Gas Sensor

Hao Yilong, Xu Jiajia, Zhang Guobing, Wu Guoying and Yan Guizhen

+ Author Affiliations

PDF

Abstract: A new silicon beam resonator design for a novel gas sensor based on simultaneous conductivity and mass change measurement is investigated.High selectivity and sensitivity in gas detection can be obtained by measuring the charge-to-mass ratio of gas molecules.Structures of silicon beam resonators are designed,simulated,and optimized.This gas sensor is fabricated using sacrificial layer microelectronmechanical system technology,and the resonant frequency of the microbeam is measured.

Key words: MEMS micro gas sensorcharge-to-mass ratio sacrificial layer technology

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 2764 Times PDF downloads: 1641 Times Cited by: 0 Times

    History

    Received: 20 August 2015 Revised: Online: Published: 01 April 2006

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Hao Yilong, Xu Jiajia, Zhang Guobing, Wu Guoying, Yan Guizhen. Design of a Silicon Beam Resonator for a Novel Gas Sensor[J]. Journal of Semiconductors, 2006, In Press. Hao Y L, Xu J J, Zhang G B, Wu G Y, Yan G Z. Design of a Silicon Beam Resonator for a Novel Gas Sensor[J]. Chin. J. Semicond., 2006, 27(4): 658.Export: BibTex EndNote
      Citation:
      Hao Yilong, Xu Jiajia, Zhang Guobing, Wu Guoying, Yan Guizhen. Design of a Silicon Beam Resonator for a Novel Gas Sensor[J]. Journal of Semiconductors, 2006, In Press.

      Hao Y L, Xu J J, Zhang G B, Wu G Y, Yan G Z. Design of a Silicon Beam Resonator for a Novel Gas Sensor[J]. Chin. J. Semicond., 2006, 27(4): 658.
      Export: BibTex EndNote

      Design of a Silicon Beam Resonator for a Novel Gas Sensor

      • Received Date: 2015-08-20

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return