Citation: |
Hao Yilong, Xu Jiajia, Zhang Guobing, Wu Guoying, Yan Guizhen. Design of a Silicon Beam Resonator for a Novel Gas Sensor[J]. Journal of Semiconductors, 2006, In Press.
Hao Y L, Xu J J, Zhang G B, Wu G Y, Yan G Z. Design of a Silicon Beam Resonator for a Novel Gas Sensor[J]. Chin. J. Semicond., 2006, 27(4): 658.
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Design of a Silicon Beam Resonator for a Novel Gas Sensor
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Abstract
A new silicon beam resonator design for a novel gas sensor based on simultaneous conductivity and mass change measurement is investigated.High selectivity and sensitivity in gas detection can be obtained by measuring the charge-to-mass ratio of gas molecules.Structures of silicon beam resonators are designed,simulated,and optimized.This gas sensor is fabricated using sacrificial layer microelectronmechanical system technology,and the resonant frequency of the microbeam is measured. -
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