Chin. J. Semicond. > 2002, Volume 23 > Issue 12 > 1245-1248
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微电子机械器件压膜空气阻尼的一般化雷诺方程(英文)

鲍敏杭 , 孙远程 , 杨恒 and 王跃林

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Key words: 压膜空气阻尼, 微电子机械器件, 雷诺方程

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    Received: 19 August 2015 Revised: Online: Published: 01 December 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(12): 1245-1248
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      • Received Date: 2015-08-19

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