Effects of the Heat Transfer Through Powder Source on the Silicon Carbide Crystal Growth by PVT

Zhang Qunshe; Chen Zhiming; Li Liuchen; Yang Feng; Pu Hongbin; Feng Xianfeng

Article Navigation > Journal of Semiconductors > 2007 > 28(1): 60-64

Zhang Qunshe, Chen Zhiming, Li Liuchen, Yang Feng, Pu Hongbin, Feng Xianfeng. Effects of the Heat Transfer Through Powder Source on the Silicon Carbide Crystal Growth by PVT[J]. Journal of Semiconductors, 2007, In Press. Zhang Q S, Chen Z M, Li L C, Yang F, Pu H B, Feng X F. Effects of the Heat Transfer Through Powder Source on the Silicon Carbide Crystal Growth by PVT[J]. Chin. J. Semicond., 2007, 28(1): 60.Export: BibTex EndNote

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Zhang Q S, Chen Z M, Li L C, Yang F, Pu H B, Feng X F. Effects of the Heat Transfer Through Powder Source on the Silicon Carbide Crystal Growth by PVT[J]. Chin. J. Semicond., 2007, 28(1): 60.

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Zhang Q S, Chen Z M, Li L C, Yang F, Pu H B, Feng X F. Effects of the Heat Transfer Through Powder Source on the Silicon Carbide Crystal Growth by PVT[J]. Chin. J. Semicond., 2007, 28(1): 60.

Export: BibTex EndNote

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Effects of the Heat Transfer Through Powder Source on the Silicon Carbide Crystal Growth by PVT

Department of Electronic Engineering,Xi’an University of Technology,Xi’an 710048,China
Department of Electronic Engineering,Xi’an University of Technology,Xi’an 710048,China
Department of Electronic Engineering,Xi’an University of Technology,Xi’an 710048,China
Xi’an Jiaotong University,Xi’an 710048,China
Department of Electronic Engineering,Xi’an University of Technology,Xi’an 710048,China
Department of Electronic Engineering,Xi’an University of Technology,Xi’an 710048,China

Received Date: 2015-08-18
Accepted Date: 2006-07-20
Revised Date: 2006-08-10
Published Date: 2006-12-26

Abstract

Abstract

Influences of different porosities in SiC powder source on as-grown crystal are investigated.The temperature distributions in the powder and growth chamber are analyzed for powder sources with different porosities.Combining these results with growth experiments,the relation between the isothermal line and the surface shape of as-grown crystal is also discussed.All simulated and experimental results indicate that the crystal surface shape is determined directly by isothermality in the growth chamber,and that more porosity in the powder is propitious to the evaporation of powder and crystal growth.
- SiC powder,
- PVT method,
- temperature distribution,
- porosity

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