Chin. J. Semicond. > 2007, Volume 28 > Issue 3 > 420-424

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Thermal Conductivity of Meso-Porous Silicon Prepared by the Double-Tank Electrochemical Corrosion Method

Fang Zhenqian, Hu Ming, Zhang Wei, Zhang Xurui and Yang Haibo

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Abstract: A theoretical model describing mechanisms of heat transfer in meso-porous silicon (meso-PS) layer based on the effective medium theory is brought forward.The influencing factors of effective thermal conductivity (ETC) of meso-PS,including the porosity of meso-PS,the heat capacity of silicon at constant volume,and the phonon mean free path of silicon,were analyzed theoretically,and a calculation formula of TC of meso-PS was given.The porosities of meso-PS samples prepared by the double-tank electrochemical corrosion method were 62% and 79%, respectively.Their TC values yielded by micro-Raman spectroscopy were 8.315 and 0.949W/(m·K),respectively.Scanning electron microscopy shows that the average characteristic sizes of meso-PS samples with porosities of 62% and 79% are 10 and 5nm,respectively.According to the formula for TC of meso-PS,the theoretical ETC value of a meso-PS layer with a porosity of 62% and an average characteristic size of 10nm is 10.753 W/(m·K),and that of meso-PS layer with a porosity of 79% and an average characteristic size of 5nm is 1.035W/(m·K).It is shown that the theoretical values are quite in good agreement with experimental data.Meso-PS with low TC is well suited for thermal insulation material,which is attractive for use in microsensors and microelectro-mechanical systems.

Key words: :theoretical modelmeso-porous siliconmicro-Raman spectroscopyeffective thermal conductivitymicrosensorsmicroelectro-mechanical system

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    Received: 18 August 2015 Revised: 06 November 2006 Online: Published: 01 March 2007

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      Fang Zhenqian, Hu Ming, Zhang Wei, Zhang Xurui, Yang Haibo. Thermal Conductivity of Meso-Porous Silicon Prepared by the Double-Tank Electrochemical Corrosion Method[J]. Journal of Semiconductors, 2007, In Press. Fang Z Q, Hu M, Zhang W, Zhang X R, Yang H B. Thermal Conductivity of Meso-Porous Silicon Prepared by the Double-Tank Electrochemical Corrosion Method[J]. Chin. J. Semicond., 2007, 28(3): 420.Export: BibTex EndNote
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      Fang Zhenqian, Hu Ming, Zhang Wei, Zhang Xurui, Yang Haibo. Thermal Conductivity of Meso-Porous Silicon Prepared by the Double-Tank Electrochemical Corrosion Method[J]. Journal of Semiconductors, 2007, In Press.

      Fang Z Q, Hu M, Zhang W, Zhang X R, Yang H B. Thermal Conductivity of Meso-Porous Silicon Prepared by the Double-Tank Electrochemical Corrosion Method[J]. Chin. J. Semicond., 2007, 28(3): 420.
      Export: BibTex EndNote

      Thermal Conductivity of Meso-Porous Silicon Prepared by the Double-Tank Electrochemical Corrosion Method

      • Received Date: 2015-08-18
      • Accepted Date: 2006-06-20
      • Revised Date: 2006-11-06
      • Published Date: 2007-03-06

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