Chin. J. Semicond. > 2002, Volume 23 > Issue 6 > 609-613

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用于微波/射频集成电路的一种新型低损耗介质——多孔硅及氧化多孔硅厚膜

龙永福 , 朱自强 , 赖宗声 , 忻佩胜 and 石艳玲

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Key words: 微波/射频, 多孔硅/氧化多孔硅, 介质膜, 损耗

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    Received: 19 August 2015 Revised: Online: Published: 01 June 2002

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      • Received Date: 2015-08-19

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