Chin. J. Semicond. > 1993, Volume 14 > Issue 12 > 734-737
|

CONTENTS

锗离子注入硅单晶的非晶化及二次缺陷的研究

范缇文 , 张敬平 and P.L.F.Hemment

+ Author Affiliations

PDF

    • Search

    Advanced Search >>

    Article Metrics

    Article views: 2011 Times PDF downloads: 1006 Times Cited by: 0 Times

    History

    Received: 20 August 2015 Revised: Online: Published: 01 December 1993

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 1993  >  14(12): 734-737
      Export: BibTex EndNote
      Citation:


      Export: BibTex EndNote
      shu

      • Received Date: 2015-08-20

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return