| Citation: |
Wu Rui, Liao Xiaoping, Zhang Zhiqiang. MMIC-Based RF On-Chip LC Passive Filters[J]. Journal of Semiconductors, 2008, In Press.
Wu R, Liao X P, Zhang Z Q. MMIC-Based RF On-Chip LC Passive Filters[J]. J. Semicond., 2008, 29(12): 2437.
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MMIC-Based RF On-Chip LC Passive Filters
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Abstract
The design and fabrication of on-chip LC low/band-pass filters are presented,and the filters are accomplished with MMIC process.Measurement results show that the Q of a 3nH inductor is 13.8 at 6.8GHz and the self-resonant frequency is 15.5GHz.The measured cutoff/center frequencies of low/band-pass filters agree with the design,and the contrast are 2% and 3.3% respectively.The insertion loss of low-pass filters is less than 3dB,and the insertion loss of band-pass filter is 7.2dB at the center frequency.-
Keywords:
- LC passive filter,
- inductor,
- capacitor,
- MMIC
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References
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