Chin. J. Semicond. > 2004, Volume 25 > Issue 6 > 697-701
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静电驱动悬臂梁数模转换器设计、分析与模拟

王立峰 and 黄庆安

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Key words: 悬臂梁, 微执行器, 非线性误差, 数模转换器

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    Received: 19 August 2015 Revised: Online: Published: 01 June 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(6): 697-701
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      • Received Date: 2015-08-19

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