Chin. J. Semicond. > 2003, Volume 24 > Issue 9 > 994-998
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低损耗微波MEMS共平面波导在低阻硅上的实现

石艳玲 , 忻佩胜 , 邵丽 , 游淑珍 , 朱自强 and 赖宗声

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Key words: 共平面波导, 低阻硅衬底, 微机械加工技术, 插入损耗

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    Received: 20 August 2015 Revised: Online: Published: 01 September 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(9): 994-998
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      • Received Date: 2015-08-20

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