Chin. J. Semicond. > 2005, Volume 26 > Issue 5 > 1028-1032

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MEMS多层膜残余应力全场光学在线测试

聂萌 , 黄庆安 and 李伟华

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Key words: 残余应力多层膜曲率半径

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    Received: 19 August 2015 Revised: Online: Published: 01 May 2005

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      • Received Date: 2015-08-19

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