Chin. J. Semicond. > 2005, Volume 26 > Issue 8 > 1599-1604
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考虑微磁芯磁阻的分布参数微梁执行器小信号宏模型

方玉明 , 黄庆安 and 李伟华

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Key words: 多级曲折磁芯微梁执行器, 力-磁耦合, 宏模型, 悬壁梁

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    Received: 18 August 2015 Revised: Online: Published: 01 August 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(8): 1599-1604
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      • Received Date: 2015-08-18

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