Chin. J. Semicond. > 2005, Volume 26 > Issue S1 > 49-51

CONTENTS

SEM Investigation on Influences of ZnS/CuInS2/Mo/SL-Glass Substrate on RF Sputtered ZnO∶Al Films

Shao Lexi, Liu Xiaoping and Hwang Hueyliang

+ Author Affiliations

PDF

Abstract: Zinc oxide doped with aluminum (ZnO∶Al) thin films are prepared on ZnS/CuInS2/Mo/soda-lime glass substrates by using radio frequency magnitron sputtering technique with ceramics ZnO∶Al2O3 as the target under the same deposition conditions at 200℃.The influences of growth parameters of the ZnS and CuInS2 layers on the deposited ZnO∶Al film surface morphology are investigated by SEM.The results show that increase of the sulfur content whether from ZnS or CuInS2 results in crystallinity quality raising and that increasing metal content in the sublayers will improve the uniformity of the deposited ZnO∶Al films.

Key words: zinc oxide doped with aluminum thin filmradio frequency sputteringscanning electron microscopyZnS/CuInS2/Mo/soda-lime glass substrate

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 2861 Times PDF downloads: 861 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 December 2005

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Shao Lexi, Liu Xiaoping, Hwang Hueyliang. SEM Investigation on Influences of ZnS/CuInS2/Mo/SL-Glass Substrate on RF Sputtered ZnO∶Al Films[J]. Journal of Semiconductors, 2005, In Press. Shao L X, Liu X P, Hwang H. SEM Investigation on Influences of ZnS/CuInS2/Mo/SL-Glass Substrate on RF Sputtered ZnO∶Al Films[J]. Chin. J. Semicond., 2005, 26(13): 49.Export: BibTex EndNote
      Citation:
      Shao Lexi, Liu Xiaoping, Hwang Hueyliang. SEM Investigation on Influences of ZnS/CuInS2/Mo/SL-Glass Substrate on RF Sputtered ZnO∶Al Films[J]. Journal of Semiconductors, 2005, In Press.

      Shao L X, Liu X P, Hwang H. SEM Investigation on Influences of ZnS/CuInS2/Mo/SL-Glass Substrate on RF Sputtered ZnO∶Al Films[J]. Chin. J. Semicond., 2005, 26(13): 49.
      Export: BibTex EndNote

      SEM Investigation on Influences of ZnS/CuInS2/Mo/SL-Glass Substrate on RF Sputtered ZnO∶Al Films

      • Received Date: 2015-08-19

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return