Chin. J. Semicond. > 1989, Volume 10 > Issue 10 > 775-780

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大功率晶体管刻槽与钝化工艺研究

万积庆 and 廖晓华

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    Received: 19 August 2015 Revised: Online: Published: 01 October 1989

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      • Received Date: 2015-08-19

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