Chin. J. Semicond. > 2006, Volume 27 > Issue S1 > 407-410

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Si-Glass Hermetic Package with the Benzo-Cyclo-Butene Material

Liu Yufei, Liu Wenping, Li Sihua, Wu Yaming and Luo Le

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Abstract: The characteristics of the wafer level low-temperature bonding with the benzo-cyclo-butene(BCB) material are studied experimentally and compared with the 300℃ anodic bonding.The results show that the bonding temperature with BCB is below 250℃,the hermeticity is (5.5±0.5)E-4Pa cc/s He,the shear strength is from 9.0 to 13.4MPa,and the yield is 100%.It shows that using the BCB material is an effective way for wafer level low-temperature hermetic package.According to the simplified seepage model,the relationship between the leakage rate and the distance from the hole to the device border is also studied.

Key words: low-temperature bondinghermetic packagebenzo-cyclo-butene(BCB)seepage model

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    Received: 20 August 2015 Revised: Online: Published: 01 December 2006

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      Liu Yufei, Liu Wenping, Li Sihua, Wu Yaming, Luo Le. Si-Glass Hermetic Package with the Benzo-Cyclo-Butene Material[J]. Journal of Semiconductors, 2006, In Press. Liu Y F, Liu W P, Li S H, Wu Y M, Luo L. Si-Glass Hermetic Package with the Benzo-Cyclo-Butene Material[J]. Chin. J. Semicond., 2006, 27(13): 407.Export: BibTex EndNote
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      Liu Yufei, Liu Wenping, Li Sihua, Wu Yaming, Luo Le. Si-Glass Hermetic Package with the Benzo-Cyclo-Butene Material[J]. Journal of Semiconductors, 2006, In Press.

      Liu Y F, Liu W P, Li S H, Wu Y M, Luo L. Si-Glass Hermetic Package with the Benzo-Cyclo-Butene Material[J]. Chin. J. Semicond., 2006, 27(13): 407.
      Export: BibTex EndNote

      Si-Glass Hermetic Package with the Benzo-Cyclo-Butene Material

      • Received Date: 2015-08-20

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