Chin. J. Semicond. > 2004, Volume 25 > Issue 5 > 552-556
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光读出热成像芯片的优化设计与ANSYS模拟

冯飞 , 焦继伟 , 熊斌 and 王跃林

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Key words: 微机电系统(MEMS), 光读出热成像, 可动微镜阵列, 热-机械灵敏度, 热响应时间常数

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    Received: 19 August 2015 Revised: Online: Published: 01 May 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(5): 552-556
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      • Received Date: 2015-08-19

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