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Wu Wengang , Chen Qinghua , Yin Dongqing , Yan Guizhen , Chen Zhangyuan , Hao Yilong and and Xu Anshi
Key words: micromirror, hybrid electrostatic driving structure, planar plate drive, vertical comb drive, mixed silicon micromachining
Article views: 2350 Times PDF downloads: 1118 Times Cited by: 0 Times
Received: 18 August 2015 Revised: Online: Published: 01 September 2005
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