Chin. J. Semicond. > 2003, Volume 24 > Issue 3 > 307-311

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Key words: 背面Ar+轰击, 低频噪声, 迁移率, 界面态

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    Received: 20 August 2015 Revised: Online: Published: 01 March 2003

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      • Received Date: 2015-08-20

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