| Citation: |
Jiang Yingqi, Wang Xiaohong, Zhong Lingyan, Liu Litian. An Air-Breathing Micro Direct Methanol Fuel Cell with 3D KOH-Etched Cathode Structure[J]. Journal of Semiconductors, 2006, In Press.
Jiang Y Q, Wang X H, Zhong L Y, Liu L T. An Air-Breathing Micro Direct Methanol Fuel Cell with 3D KOH-Etched Cathode Structure[J]. Chin. J. Semicond., 2006, 27(3): 478.
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An Air-Breathing Micro Direct Methanol Fuel Cell with 3D KOH-Etched Cathode Structure
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Abstract
A micro direct methanol fuel cell (μDMFC) using MEMS technology is reported.The prototype features a unique 3D air-breathing cathode structure fabricated using KOH etching and double-side lithography.The optimization of the MEMS fabrication process is analyzed.The experimental results show the prototype generates a maximum power density of 2.52mW/cm2 at room temperature.This performance is better than the published results of other silicon-based passive μDMFCs.Moreover,it is comparable with that of our previous active μDMFCs which require an external pump,certificating the feasibility of this new configuration.-
Keywords:
- μDMFC,
- air breathing,
- bulk etching,
- MEMS,
- micro power source
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References
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