Chin. J. Semicond. > 2007, Volume 28 > Issue S1 > 190-192

Heteroepitaxy of InP/GaAs by MOCVD

Zhou Jing, Wang Qi, Xiong Deping, Cai Shiwei, Huang Hui, Huang Yongqing and Ren Xiaomin

+ Author Affiliations

PDF

Abstract: InP is grown on GaAs substrate by metalorganic chemical vapor deposition(MOCVD).The InP low temperature buffer layer is firstly deposited on the substrate followed by the InP epitaxial layer.It is found that the buffer layer’s grown at 450"C with 15nm thickness could obtain high quality InP epitaxial layer.Furthermore,with increasing the epitaxial layer's thickness,the sample's crystalline quality is enhanced.Finally,the double crystal X·ray diffraction (DCXRD) measurement with off20 scan shows that the annealed sample can obtain the full width at half maximum (FWHM)of 238.5".

Key words: heteroepitaxyInPGaAsMOCVDlow temperature buffer

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 2190 Times PDF downloads: 344 Times Cited by: 0 Times

    History

    Received: 27 May 2016 Revised: Online: Published: 01 January 2007

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Zhou Jing, Wang Qi, Xiong Deping, Cai Shiwei, Huang Hui, Huang Yongqing, Ren Xiaomin. Heteroepitaxy of InP/GaAs by MOCVD[J]. Journal of Semiconductors, 2007, In Press. Zhou J, Wang Q, Xiong D P, Cai S W, Huang H, Huang Y Q, Ren X M. Heteroepitaxy of InP/GaAs by MOCVD[J]. Chin. J. Semicond., 2007, 28(S1): 190.Export: BibTex EndNote
      Citation:
      Zhou Jing, Wang Qi, Xiong Deping, Cai Shiwei, Huang Hui, Huang Yongqing, Ren Xiaomin. Heteroepitaxy of InP/GaAs by MOCVD[J]. Journal of Semiconductors, 2007, In Press.

      Zhou J, Wang Q, Xiong D P, Cai S W, Huang H, Huang Y Q, Ren X M. Heteroepitaxy of InP/GaAs by MOCVD[J]. Chin. J. Semicond., 2007, 28(S1): 190.
      Export: BibTex EndNote

      Heteroepitaxy of InP/GaAs by MOCVD

      • Received Date: 2016-05-27
      • Published Date: 2016-04-28

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return