Chin. J. Semicond. > 2007, Volume 28 > Issue S1 > 588-590

Characteristics of Metal-Semiconductor-Metal Photodetectors Based on GaN

Liu Wenbao, Sun Xian, Wang Xiaolan, Zhang Shuang, Liu Zongshun, Zhao Degang and Yang Hui

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Abstract: Metal-Semiconductor-Metal type(MSM)Dhotodetectors were fabricated on unintentional doped GaN epitaxial films which were grown on sapphire substrate by metal organic chemical vapor deposition(MOCVD).Their characteristics of dark current and photo response were investigated.It was found that the dark current degraded after voltage ageing,and there was an abnormal reverse current under small voltage which can be restored with white light exposure.In addition,a peak photoconductive response around 368tim was observed,and it can be quenched under 808nm laser irradiation.Accord. ing to a trap model the mechanism behind was supposed.

Key words: GaNMSM photodetectorsdark currentphoto responsetrap model

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    Received: 27 May 2016 Revised: Online: Published: 01 January 2007

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      Liu Wenbao, Sun Xian, Wang Xiaolan, Zhang Shuang, Liu Zongshun, Zhao Degang, Yang Hui. Characteristics of Metal-Semiconductor-Metal Photodetectors Based on GaN[J]. Journal of Semiconductors, 2007, In Press. Liu W B, Sun X, Wang X L, Zhang S, Liu Z S, Zhao D G, Yang H. Characteristics of Metal-Semiconductor-Metal Photodetectors Based on GaN[J]. Chin. J. Semicond., 2007, 28(S1): 588.Export: BibTex EndNote
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      Liu Wenbao, Sun Xian, Wang Xiaolan, Zhang Shuang, Liu Zongshun, Zhao Degang, Yang Hui. Characteristics of Metal-Semiconductor-Metal Photodetectors Based on GaN[J]. Journal of Semiconductors, 2007, In Press.

      Liu W B, Sun X, Wang X L, Zhang S, Liu Z S, Zhao D G, Yang H. Characteristics of Metal-Semiconductor-Metal Photodetectors Based on GaN[J]. Chin. J. Semicond., 2007, 28(S1): 588.
      Export: BibTex EndNote

      Characteristics of Metal-Semiconductor-Metal Photodetectors Based on GaN

      • Received Date: 2016-05-27
      • Published Date: 2016-04-28

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