Reservoir Effect in Multi-Layer Metal System

Guo Chunsheng; Li Xiuyu; Li Zhiguo; Wu Yuehua

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Article Navigation > Journal of Semiconductors > 2007 > 28(S1): 452-456

Guo Chunsheng, Li Xiuyu, Li Zhiguo, Wu Yuehua. Reservoir Effect in Multi-Layer Metal System[J]. Journal of Semiconductors, 2007, In Press. Guo C S, Li X Y, Li Z G, Wu Y H. Reservoir Effect in Multi-Layer Metal System[J]. Chin. J. Semicond., 2007, 28(S1): 452.Export: BibTex EndNote

Citation:

Guo Chunsheng, Li Xiuyu, Li Zhiguo, Wu Yuehua. Reservoir Effect in Multi-Layer Metal System[J]. Journal of Semiconductors, 2007, In Press.

Guo C S, Li X Y, Li Z G, Wu Y H. Reservoir Effect in Multi-Layer Metal System[J]. Chin. J. Semicond., 2007, 28(S1): 452.

Export: BibTex EndNote

Citation:

Guo Chunsheng, Li Xiuyu, Li Zhiguo, Wu Yuehua. Reservoir Effect in Multi-Layer Metal System[J]. Journal of Semiconductors, 2007, In Press.

Guo C S, Li X Y, Li Z G, Wu Y H. Reservoir Effect in Multi-Layer Metal System[J]. Chin. J. Semicond., 2007, 28(S1): 452.

Export: BibTex EndNote

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Reservoir Effect in Multi-Layer Metal System

College of Electronic Information and Control Engineering，Beijing University of Technology，Beiiing 100022，China,College of Electronic Information and Control Engineering，Beijing University of Technology，Beiiing 100022，China,College of Electronic Information and Control Engineering，Beijing University of Technology，Beiiing 100022，China and College of Electronic Information and Control Engineering，Beijing University of Technology，Beiiing 100022，China

Received Date: 2016-05-27
Published Date: 2016-04-28

Abstract

Abstract

Metal iron reservoirs in multi·layer metal system with W via have great effects on the electro-migration lifetime. In this study，the sample with different reservoir structure was designed for the electro-migration test.The effect of reservoir area，via displace，amount and size on electro-migration lifetime was concluded·and reservoir area play a significant role a- mong all factors.
- interconnects,
- reservoir effect,
- electro-migration

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