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1.55μm InP-InGaAsP Quantum-Well Lasers Fabricatedon Si Substrates by Wafer Bonding

Yu Lijuan, Zhao Hongquan, Du Yun and Huang Yongzhen

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Abstract: 1.55μm InP-InGaAsP quantum-well lasers are fabricated on Si substrates by wafer bonding.The laser structures are designed and grown by MOCVD and bonded to Si wafers The laser are then fabricated on the bonded thin films.Room-temperature operation is achieved for 20μm-wide mesa lasers with a threshold current of 160mA and an output power of 10mW at 350mA.

Key words: wafer bondinglong-wavelength laserSi substrate

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    Received: 20 August 2015 Revised: Online: Published: 01 April 2006

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      Yu Lijuan, Zhao Hongquan, Du Yun, Huang Yongzhen. 1.55μm InP-InGaAsP Quantum-Well Lasers Fabricatedon Si Substrates by Wafer Bonding[J]. Journal of Semiconductors, 2006, In Press. Yu L J, Zhao H Q, Du Y, Huang Y Z. 1.55μm InP-InGaAsP Quantum-Well Lasers Fabricatedon Si Substrates by Wafer Bonding[J]. Chin. J. Semicond., 2006, 27(4): 741.Export: BibTex EndNote
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      Yu Lijuan, Zhao Hongquan, Du Yun, Huang Yongzhen. 1.55μm InP-InGaAsP Quantum-Well Lasers Fabricatedon Si Substrates by Wafer Bonding[J]. Journal of Semiconductors, 2006, In Press.

      Yu L J, Zhao H Q, Du Y, Huang Y Z. 1.55μm InP-InGaAsP Quantum-Well Lasers Fabricatedon Si Substrates by Wafer Bonding[J]. Chin. J. Semicond., 2006, 27(4): 741.
      Export: BibTex EndNote

      1.55μm InP-InGaAsP Quantum-Well Lasers Fabricatedon Si Substrates by Wafer Bonding

      • Received Date: 2015-08-20

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