| Citation: |
Song Qinglin, Xia Shanhong, Chen Shaofeng, Zhang Jiangang. Thermal Characteristics of silicon nitride Thin membrane[J]. Journal of Semiconductors, 2003, In Press.
Song Q L, Xia S H, Chen S F, Zhang J G. Thermal Characteristics of silicon nitride Thin membrane[J]. Chin. J. Semicond., 2003, 24(S1): 47.
Export: BibTex EndNote
|
Thermal Characteristics of silicon nitride Thin membrane
-
Abstract
For researching on the thermal characteristics of silicon nitride thin membrane such as heat capacity, radiation, convection, and so on, a kind of floating membrane is designed. And thermal transfer mechanism of the floating membrane is analyzed. Si3N4 floating membranes with different areas and thicknesses are fabricated by Using micro-fabrication techniques, and their several thermal parameters of them are obtained from experiments.-
Keywords:
- thermal characteristics,
- heat capacity,
- floating membrane
-
References
-
Proportional views
DownLoad: