Chin. J. Semicond. > 2007, Volume 28 > Issue 10 > 1625-1629

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Fabricating High Performance Diffractive Microlens by Single Step Photolithography and Wet Etching

Zhang Xinyu, Chen Shengbin, Ji An and Xie Changsheng

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Abstract: We discuss a low cost fabrication method of a diffractive microlens with high performance for both blue and red DVD objective lenses,which consists of single-step photolithography and a wet etching process.The surface roughness of the fabricated micro-optics structure is in the nanometer range;The feature height of the diffractive phase step is in the sub-micrometer range;And can be adjusted according to requirements;And the optical aperture of the microlens can be changed from millimeter to centimeter magnitude.A large number of basic phase structures in the diffractive microlens can be set and arranged by a diffractive integrating algorithm according to the appearance and feature parameters of the beam process.Far field optical measurement shows a high diffractive efficiency of the fabricated diffractive structure.

Key words: diffractive microlens with high performancediffractive integrating algorithmsingle step photolithographywet etching technologyDVD object lens

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    Received: 18 August 2015 Revised: 18 April 2007 Online: Published: 01 October 2007

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      Zhang Xinyu, Chen Shengbin, Ji An, Xie Changsheng. Fabricating High Performance Diffractive Microlens by Single Step Photolithography and Wet Etching[J]. Journal of Semiconductors, 2007, In Press. Zhang X Y, Chen S B, Ji A, Xie C S. Fabricating High Performance Diffractive Microlens by Single Step Photolithography and Wet Etching[J]. Chin. J. Semicond., 2007, 28(10): 1625.Export: BibTex EndNote
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      Zhang Xinyu, Chen Shengbin, Ji An, Xie Changsheng. Fabricating High Performance Diffractive Microlens by Single Step Photolithography and Wet Etching[J]. Journal of Semiconductors, 2007, In Press.

      Zhang X Y, Chen S B, Ji A, Xie C S. Fabricating High Performance Diffractive Microlens by Single Step Photolithography and Wet Etching[J]. Chin. J. Semicond., 2007, 28(10): 1625.
      Export: BibTex EndNote

      Fabricating High Performance Diffractive Microlens by Single Step Photolithography and Wet Etching

      • Received Date: 2015-08-18
      • Accepted Date: 2007-04-05
      • Revised Date: 2007-04-18
      • Published Date: 2007-09-26

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